Output Characteristics of Capacitive Seismic Acceleration Sensor With Consideration of Edge Effect
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摘要: 为研究考虑边缘效应的电容式地震加速度传感器输出特性，将理论分析与计算机数值模拟相结合，利用保角变换法、格林函数法和MATLAB软件，对考虑边缘效应的平行板电容器电场和电容进行讨论，并研究电容式地震加速度传感器的输出特性，分析了传感器误差随参数的变化情况，讨论了影响其输出特性的因素，给出了传感器参数的取值范围，明确了改善地震加速度传感器输出特性的途径，并通过变压器桥式电路实现了对地震加速度的测量。
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关键词:
- 边缘效应 /
- 电容式地震加速度传感器 /
- 数值模拟 /
- 加速度 /
- 输出特性
Abstract: To investigate the output characteristics of capacitive seismic acceleration sensors considering edge effects, this study combines theoretical analysis with numerical simulation. The electric field distribution and capacitance of a parallel plate capacitor accounting for edge effects are examined using conformal transformation, Green’s function methods, and MATLAB software. The output characteristics of the capacitive seismic acceleration sensor are analyzed, focusing on how sensor errors vary with key parameters. Factors influencing sensor performance are discussed, and optimal parameter ranges are proposed. Additionally, methods to enhance the output characteristics of seismic acceleration sensors are outlined, and the measurement of earthquake acceleration is implemented via a transformer bridge circuit. -
图 1 差动平板电容式地震加速度传感器结构图
Figure 1. Structure diagram of differential plate capacitive seismic acceleration sensor
图 4 考虑边缘效应的平行板电容器电场线与等势线（面）
Figure 4. Electric field line and equipotential line （plane） of parallel plate capacitor considering edge effect
图 5 变极距差动平板式电容传感器结构图
Figure 5. Structure diagram of differential flat capacitive sensor with variable polar distance
图 9 极板间距对地震加速度传感器输出特性的影响
Figure 9. The influence of plate spacing on the output characteristic of seismic acceleration sensor
图 7 极板面积对地震加速度传感器输出特性的影响
Figure 7. The influence of plate area on the output characteristic of seismic acceleration sensor
图 8 极板长宽比对地震加速度传感器输出特性的影响
Figure 8. The influence of plate aspect on the output characteristic of seismic acceleration sensor
图 10 弹簧的劲度系数对地震加速度传感器输出特性的影响
Figure 10. The influence of spring stifness coeffcient on the output characteristic of seismic acceleration sensor
图 11 惯性质量对地震加速度传感器 输出特性的影响
Figure 11. The influence of inertial mass on the output characteristic of seismic acceleration senso
图 12 考虑边缘效应的电容式地震加速度传感器的输出特性曲线
Figure 12. Output characteristic curve of capacitive seismic acceleration sensor considering edge effect
表 1 相对误差随极板间距的变化
Table 1. Variation of relative error with plate spacing
d0/mm $ \dfrac{\Delta C}{C\mathrm{_c}} $/% d0/mm $ \dfrac{\Delta C}{C\mathrm{_c}} $/% 20 − 51.7215 6.0 − 1.1349 19 − 47.5649 5.0 − 0.3896 18 − 43.3098 4.5 − 0.1924 17 − 38.9768 4.0 − 0.0803 16 − 34.5935 3.5 − 0.0264 15 − 30.1962 3.0 − 0.0061 14 − 25.8316 2.5 − 8.3710 ×10−413 − 21.5579 2.0 − 4.8154 ×10−512 − 17.4459 1.5 − 6.0296 ×10−711 − 13.5793 1.0 − 3.0872 ×10−1010 − 10.0521 0.9 − 3.2604 ×10−119 − 6.9636 0.8 − 2.3009 ×10−128 − 4.4082 0.7 − 1.0142 ×10−137 − 2.4573 0.6 0 注：L=3 cm，w=2 cm，m=3 g，K=100 N/m。 
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